Unity Web Player 64-bit fails to install

I've tried cleaning my registry, and whatnot, but I always end up with an error. Here's the log:

Delete file: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\loader-x64\UnityWebPluginAX.ocx Delete file: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\loader-x64\npUnity3D64.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer Extract: UnityBugReporter.exe Extract: UnityWebPlayerUpdate.exe Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\loader-x64 Extract: UnityWebPlayerNP.map Extract: UnityWebPluginAX.ocx Extract: info.plist Extract: npUnity3D64.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\player\Stable3.x.x-x64 Extract: info.plist Extract: webplayer_win.dll... 100% Extract: wrap_oal.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\player\Stable3.x.x-x64\Data Extract: unity default resources Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\player\Stable3.x.x-x64\Data\lib Extract: CrossDomainPolicyParser.dll Extract: UnityEngine.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\player\Stable3.x.x-x64 Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\mono\Stable3.x.x-x64 Extract: info.plist Extract: mono-1-vc.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\mono\Stable3.x.x-x64\Data Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\mono\Stable3.x.x-x64\Data\lib Extract: Mono.Security.dll Extract: System.Core.dll Extract: System.dll Extract: mscorlib.dll Output folder: C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\mono\Stable3.x.x-x64 Execute: regsvr32 /n /s /i:CurrentUser "C:\Users\Máté\AppData\LocalLow\Unity\WebPlayer\loader-x64\UnityWebPluginAX.ocx"